(19)
(11) EP 1 470 579 A1

(12)

(43) Date of publication:
27.10.2004 Bulletin 2004/44

(21) Application number: 02711271.3

(22) Date of filing: 31.01.2002
(51) International Patent Classification (IPC)7: H01L 21/316
(86) International application number:
PCT/JP2002/000807
(87) International publication number:
WO 2003/065438 (07.08.2003 Gazette 2003/32)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(71) Applicant: SHARP KABUSHIKI KAISHA
Osaka 545-8522 (JP)

(72) Inventors:
  • ZHUANG, Wei-Wei
    Vancouver, WA 98683 (US)
  • MAA, Jer-shen
    Vancouver, WA 98683 (US)
  • ZHANG, Fengyan
    Vancouver, WA 98683 (US)
  • HSU, Sheng Teng
    Camas, WA 98607 (US)

(74) Representative: Jacob, Reuben Ellis et al
R G C Jenkins & Co.,26 Caxton Street
London SW1H 0RJ
London SW1H 0RJ (GB)

   


(54) PGO SOLUTIONS FOR THE PREPARATION OF PGO THIN FILMS VIA SPIN COATING