(19)

(11)

EP 1 472 017 A1

(12)

(43) Date of publication: 03.11.2004 Bulletin 2004/45 (21) Application number: 03729378.4 (22) Date of filing: 07.01.2003

(51) International Patent Classification (IPC)7: B08B 3/00, G03F 7/42, H01L 21/00 (86) International application number: PCT/US2003/000529 (87) International publication number: WO 2003/057377 (17.07.2003 Gazette 2003/29)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR Designated Extension States: AL LT LV MK RO (30) Priority: 07.01.2002 US 346507 P (71) Applicant: PRAXAIR TECHNOLOGY, INC. Danbury, CT 06810-5113 (US)	(72) Inventor: BILLINGHAM, John, Fredric Getzville, NY 14068 (US) (74) Representative: Schwan - Schwan - Schorer  Bauerstrasse 22 80796 München 80796 München (DE)