(19)
(11) EP 1 472 047 A1

(12)

(43) Date of publication:
03.11.2004 Bulletin 2004/45

(21) Application number: 03743660.7

(22) Date of filing: 17.01.2003
(51) International Patent Classification (IPC)7B24B 1/00, B24B 49/02, B24B 49/12, B24B 49/16, H01L 21/302
(86) International application number:
PCT/US2003/001704
(87) International publication number:
WO 2003/074228 (12.09.2003 Gazette 2003/37)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
Designated Extension States:
AL LT LV MK RO

(30) Priority: 17.01.2002 US 52475
12.03.2002 US 365016 P
22.03.2002 US 105016
15.07.2002 US 197090
19.07.2002 US 397110 P
27.09.2002 US 414579 P
10.10.2002 US 417544 P
17.12.2002 US 321150
23.12.2002 US 436108 P
27.12.2002 US 436706 P

(71) Applicant: Nutool, Inc.
Milpitas, CA 95035 (US)

(72) Inventors:
  • WANG, Yuchun
    San Jose, CA 95124 (US)
  • FREY, Bernard, M.
    Livermore, CA 94551 (US)
  • BASOL, Bulent, M.
    Manhattan Beach, CA 90266 (US)
  • TALIEH, Homayoun
    San Jose, CA 95138 (US)
  • YOUNG, Douglas
    Sunnyvale, CA 94086 (US)
  • MCGRATH, Bret, E.
    Lathrop, CA 95330-9156 (US)
  • DESAI, Mukesh
    Milpitas, CA 95035 (US)
  • VELAZQUEZ, Efrain
    Los Angeles, CA 90042 (US)
  • TRUONG, Tuan
    San Jose, CA 95132 (US)

(74) Representative: Flint, Adam 
W.H. Beck, Greener & Co.,7 Stone Buildings,Lincoln's Inn
London WC2A 3SZ
London WC2A 3SZ (GB)

   


(54) ADVANCED CHEMICAL MECHANICAL POLISHING SYSTEM WITH SMART ENDPOINT DETECTION