(19)
(11) EP 1 472 179 A2

(12)

(88) Date of publication A3:
04.03.2004

(43) Date of publication:
03.11.2004 Bulletin 2004/45

(21) Application number: 02802757.1

(22) Date of filing: 02.08.2002
(51) International Patent Classification (IPC)7C01B 3/24, C10G 27/04, C10G 32/02, C10G 35/16
(86) International application number:
PCT/US2002/024477
(87) International publication number:
WO 2003/040027 (15.05.2003 Gazette 2003/20)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 02.08.2001 US 309530 P
19.02.2002 US 358340 P

(71) Applicant: Plasmasol Corporation
Wall Township, NJ 07753 (US)

(72) Inventors:
  • RICATTO, Pascal
    Ridgewood, NJ 07450 (US)
  • HOUSTON, Edward
    East Brunswick, NJ 08816 (US)
  • CROWE, Richard
    Hazlet, NJ 07730 (US)

(74) Representative: Held, Stephan, Dr.rer.nat., Dipl.-Chem. et al
Meissner, Bolte & PartnerPostfach 86 03 29
81630 München
81630 München (DE)

   


(54) CHEMICAL PROCESSING USING NON-THERMAL DISCHARGE PLASMA