(19)
(11) EP 1 476 590 A1

(12)

(43) Date of publication:
17.11.2004 Bulletin 2004/47

(21) Application number: 03717186.5

(22) Date of filing: 17.02.2003
(51) International Patent Classification (IPC)7: C25D 21/12, C25D 21/00
(86) International application number:
PCT/EP2003/001588
(87) International publication number:
WO 2003/071010 (28.08.2003 Gazette 2003/35)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR

(30) Priority: 21.02.2002 JP 2002044679

(71) Applicant: ATOTECH Deutschland GmbH
10553 Berlin (DE)

(72) Inventors:
  • MURANUSHI, Yoshihisa
    Tokyo, 166-0001 (JP)
  • SAITOH, Tadashi
    Yoko hama,Kanagawa, 227-0062 (JP)

(74) Representative: Albrecht, Thomas, Dr. 
Kraus & WeisertPatent- und RechtsanwälteThomas-Wimmer-Ring 15
80539 München
80539 München (DE)

   


(54) METHOD FOR STORAGE OF A METAL ION SUPPLY SOURCE IN A PLATING EQUIPMENT