(19)
(11) EP 1 476 906 A2

(12)

(88) Date of publication A3:
18.12.2003

(43) Date of publication:
17.11.2004 Bulletin 2004/47

(21) Application number: 02799001.9

(22) Date of filing: 18.09.2002
(51) International Patent Classification (IPC)7H01L 31/18, H01L 31/032
(86) International application number:
PCT/US2002/029684
(87) International publication number:
WO 2003/026028 (27.03.2003 Gazette 2003/13)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 20.09.2001 US 957125
20.09.2001 US 957050
20.09.2001 US 957123
20.09.2001 US 957121
20.09.2001 US 957132
20.09.2001 US 957207

(71) Applicant: Heliovolt Corporation
Austin, TX 78746-6490 (US)

(72) Inventor:
  • STANBERRY, Billy, J.
    Austin, TX 78746-2334 (US)

(74) Representative: Blatchford, William Michael et al
Withers & Rogers,Goldings House,2 Hays Lane
London SE1 2HW
London SE1 2HW (GB)

   


(54) APPARATUS FOR THE SYNTHESIS OF LAYERS, COATINGS OR FILMS