| (84) |
Designated Contracting States: |
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DE FR GB IT |
| (30) |
Priority: |
21.02.2002 JP 2002044215 21.02.2002 JP 2002044224
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| (43) |
Date of publication of application: |
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17.11.2004 Bulletin 2004/47 |
| (73) |
Proprietor: EBARA CORPORATION |
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Tokyo 144-8510 (JP) |
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| (72) |
Inventors: |
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- KIMURA, Katsumi,
c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
- MIWA, Toshio,
c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
- TAKASHIMA, Michio,
c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
- USAMI, Takeshi
c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
- SUGIYAMA, Kazuhiko,
c/o Ebara Corporation
Ohta-ku, Tokyo 144-8510 (JP)
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| (74) |
Representative: Wagner, Karl H. |
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Wagner & Geyer Partnerschaft
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5 80538 München 80538 München (DE) |
| (56) |
References cited: :
FR-A- 2 609 499 JP-A- 11 082 649 US-A- 3 503 281 US-A- 4 514 991 US-A- 5 433 282 US-A- 5 947 854
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JP-A- 6 249 305 JP-U- 58 069 146 US-A- 4 514 991 US-A- 5 396 214 US-A- 5 947 854
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