(19)

(11)

EP 1 478 970 A1

(12)

(43) Date of publication: 24.11.2004 Bulletin 2004/48 (21) Application number: 03742652.5 (22) Date of filing: 24.02.2003

(51) International Patent Classification (IPC)7: G02F 1/136 (86) International application number: PCT/IL2003/000142 (87) International publication number: WO 2003/071344 (28.08.2003 Gazette 2003/35)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR Designated Extension States: AL LT LV MK RO (30) Priority: 25.02.2002 US 358734 P (71) Applicant: ORBOTECH LTD. Yavne 81102 (IL)	(72) Inventors: GROSS, Abraham 69494 Ramat Aviv (IL) GLAZER, Arie 90805 Mevaseret Zion (IL) (74) Representative: White, Duncan Rohan  Marks & Clerk,Clifford's InnFetter Lane London EC4A 1BZ London EC4A 1BZ (GB)