(19)
(11) EP 1 479 100 A1

(12)

(43) Date of publication:
24.11.2004 Bulletin 2004/48

(21) Application number: 02807094.4

(22) Date of filing: 20.12.2002
(51) International Patent Classification (IPC)7H01L 21/28
(86) International application number:
PCT/US2002/041089
(87) International publication number:
WO 2003/079424 (25.09.2003 Gazette 2003/39)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR
Designated Extension States:
AL LT LV MK RO

(30) Priority: 28.02.2002 DE 10208728
30.09.2002 US 260926

(71) Applicant: ADVANCED MICRO DEVICES INC.
Sunnyvale,California 94088-3453 (US)

(72) Inventors:
  • WIECZOREK, Karsten
    01109 Dresden (DE)
  • HORSTMANN, Manfred
    01099 Dresden (DE)
  • STEPHAN, Rolf
    01139 Dresden (DE)

(74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE HAVING DIFFERENT METAL SILICIDE PORTIONS