| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR |
|
Designated Extension States: |
|
AL LT LV MK RO |
| (30) |
Priority: |
06.03.2002 US 91351
30.09.2002 US 259827
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara,California 95054 (US) |
|
| (72) |
Inventors: |
|
- FARLEY, Marvin
Ipswich, MA 01938 (US)
- SAKASE, Takao
Rowley, MA 01938 (US)
- SATOH, Shu
Byfield, MA 01922 (US)
- RYDING, Geoffrey
Manchester, MA 01944 (US)
- ROSE, Peter
Rockport, MA 01966 (US)
- CHRISTOU, Christos
Horsham,West Sussex RH13 5SE (GB)
|
| (74) |
Representative: Cross, Rupert Edward Blount |
|
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB) |
|
