(19)

(11)

EP 1 483 182 A2

(12)

(88) Date of publication A3: 25.03.2004 (43) Date of publication: 08.12.2004 Bulletin 2004/50 (21) Application number: 03711516.9 (22) Date of filing: 10.03.2003

(51) International Patent Classification (IPC)7: B65G 15/34 (86) International application number: PCT/US2003/007389 (87) International publication number: WO 2003/078859 (25.09.2003 Gazette 2003/39)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 12.03.2002 US 97337 29.03.2002 US 112447 (71) Applicant: LAM RESEARCH CORPORATION Fremont, CA 94538 (US)	(72) Inventors: LIN, Jibing Fremont, CA 94536 (US) HYMES, Diane, J. San Jose, CA 95138 (US) (74) Representative: Dendorfer, Claus, Dr.  Wächtershäuser & HartzWeinstrasse 8 80333 München 80333 München (DE)