(19)
(11) EP 1 483 616 A1

(12)

(43) Date of publication:
08.12.2004 Bulletin 2004/50

(21) Application number: 02779537.6

(22) Date of filing: 07.11.2002
(51) International Patent Classification (IPC)7: G02B 27/28, G02B 5/30, G02B 13/14, G03F 7/20
(86) International application number:
PCT/EP2002/012446
(87) International publication number:
WO 2003/077011 (18.09.2003 Gazette 2003/38)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 14.03.2002 DE 10211762

(71) Applicant: Carl Zeiss SMT AG
73447 Oberkochen (DE)

(72) Inventors:
  • FIOLKA, Damian
    73447 Oberkochen (DE)
  • DITTMAN, Olaf
    73441 Bopfingen (DE)
  • TOTZECK, Michael
    73525 Schwäbisch Gmünd (DE)
  • DIECKMANN, Nils
    73460 Hüttlingen (DE)
  • KÖHLER, Jess
    88090 Immenstaad (DE)
  • GRUNER, Toralf
    73433 Aalen-Hofen (DE)
  • KRÄHMER, Daniel
    73431 Aalen (DE)

(74) Representative: Müller-Rissmann, Werner Albrecht, Dr. 
Carl Zeiss,Patentabteilung
73446 Oberkochen
73446 Oberkochen (DE)

   


(54) OPTICAL SYSTEM WITH BIREFRINGENT OPTICAL ELEMENTS