POSITION DETECTING METHOD, SURFACE SHAPE ESTIMATING METHOD, AND EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE SAME - Patent 1483627

(19)

(11)

EP 1 483 627 A2

(12)

(88)	Date of publication A3:
	17.06.2004

(43)	Date of publication:
	08.12.2004 Bulletin 2004/50

(21)	Application number: 03710285.2

(22)	Date of filing: 07.03.2003

(51)	International Patent Classification (IPC)⁷: G03F 9/00

(86)	International application number:
	PCT/JP2003/002752

(87)	International publication number:
	WO 2003/077030 (18.09.2003 Gazette 2003/38)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

(30)

Priority:

08.03.2002 JP 2002063705

(71)	Applicant: CANON KABUSHIKI KAISHA
	Ohta-kuTokyo 146-8501 (JP)

(72)	Inventors:
	MAEDA, Kohei Tochigi 320-0003 (JP) MIURA, Seiya Tochigi 321-0943 (JP)

(74)	Representative: Leson, Thomas Johannes Alois, Dipl.-Ing.
	Tiedtke-Bühling-Kinne & Partner GbR,TBK-Patent,Bavariaring 4 80336 München 80336 München (DE)

(54)	POSITION DETECTING METHOD, SURFACE SHAPE ESTIMATING METHOD, AND EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE SAME