(19)
(11) EP 1 483 785 A1

(12)

(43) Date of publication:
08.12.2004 Bulletin 2004/50

(21) Application number: 03720656.2

(22) Date of filing: 13.03.2003
(51) International Patent Classification (IPC)7: H01L 21/321, B24B 37/04
(86) International application number:
PCT/GB2003/001066
(87) International publication number:
WO 2003/079428 (25.09.2003 Gazette 2003/39)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 13.03.2002 US 365001 P
19.07.2002 US 199471
10.10.2002 US 417544 P
17.01.2003 US 346425

(71) Applicant: Nutool, Inc.
Milpitas, CA 95035 (US)

(72) Inventors:
  • TALIEH, Homayoun
    San Jose, CA 95138 (US)
  • BROWNE, Robin, F.,Urquhart-Dykes & Lord
    Leeds LS2 8PA (GB)
  • BASON, Bulent
    Manhatten Beach, CA 900266 (US)
  • YOUNG, Douglas
    Sunnyvale, CA 94086 (US)
  • WANG, Yuchun
    San Jose, CA 95124 (US)
  • TRUONG, Tuan
    San Jose, CA 95132 (US)

(74) Representative: Browne, Robin Forsythe, Dr. 
Urquhart-Dykes & Lord LLPTower North CentralMerrion Way
Leeds LS2 8PA
Leeds LS2 8PA (GB)

   


(54) METHOD AND APPARATUS FOR INTEGRATED CHEMICAL MECHANICAL POLISHING OF COPPER AND BARRIER LAYERS