USE OF LIGHT EMITTING CHEMICAL REACTIONS FOR CONTROL OF SEMICONDUCTOR PRODUCTION PROCESSES - Patent 1485937

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EP 1 485 937 A2

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(88)	Date of publication A3:
	18.12.2003

(43)	Date of publication:
	15.12.2004 Bulletin 2004/51

(21)	Application number: 03744445.2

(22)	Date of filing: 14.03.2003

(51)	International Patent Classification (IPC)⁷: H01J 37/32

(86)	International application number:
	PCT/GB2003/001104

(87)	International publication number:
	WO 2003/079411 (25.09.2003 Gazette 2003/39)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

15.03.2002 GB 0206158

(71)	Applicant: The BOC Group plc
	WindleshamSurrey GU20 6HJ (GB)

(72)	Inventors:
	HOLBROOK, Mark, Burton Kilmarnock,Ayrshire KA3 5JT (GB) REEVE, David, Robert Chapel Hill, QLD 4069 (AU) GRANT, Robert, Bruce Steyning,West Sussex Bn44 3RD (GB)

(74)	Representative: Murnane, Graham John et al
	Murgitroyd & Company165-169 Scotland Street Glasgow G5 8PL Glasgow G5 8PL (GB)

(54)	USE OF LIGHT EMITTING CHEMICAL REACTIONS FOR CONTROL OF SEMICONDUCTOR PRODUCTION PROCESSES