(19)
(11) EP 1 487 602 A2

(12)

(88) Date of publication A3:
15.07.2004

(43) Date of publication:
22.12.2004 Bulletin 2004/52

(21) Application number: 03714419.3

(22) Date of filing: 27.03.2003
(51) International Patent Classification (IPC)7B23K 1/00
(86) International application number:
PCT/US2003/009323
(87) International publication number:
WO 2003/082507 (09.10.2003 Gazette 2003/41)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 28.03.2002 US 368421 P

(71) Applicant: GSI Lumonics Corporation
Billerica, MA 01821 (US)

(72) Inventors:
  • COUCH, Bruce, L.
    North Attleboro, MA 02763 (US)
  • EHRMANN, Jonathan, S.
    Sudbury, MA 01776 (US)
  • CHU, Yun, Fee
    Natick, MA 01760 (US)
  • LENTO, Joseph, V.
    Methuen, MA 01844 (US)
  • JOHNSON, Shepard, D.
    Andover, MA 01810 (US)

(74) Representative: Rupprecht, Kay, Dipl.-Ing. et al
Meissner, Bolte & PartnerPostfach 86 06 24
81633 München
81633 München (DE)

   


(54) METHOD AND SYSTEM FOR HIGH-SPEED, PRECISE MICROMACHINING AN ARRAY OF DEVICES