(19)

(11)

EP 1 490 906 A1

(12)

(43) Date of publication: 29.12.2004 Bulletin 2004/53 (21) Application number: 02719422.4 (22) Date of filing: 02.04.2002

(51) International Patent Classification (IPC)7: H01L 23/532, H01L 23/485 (86) International application number: PCT/US2002/010409 (87) International publication number: WO 2003/085735 (16.10.2003 Gazette 2003/42)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (71) Applicant: Infineon Technologies AG 81669 München (DE)	(72) Inventors: BARTH, Hans-Joachim 81245 München (DE) FELSNER, Petra 81545 München (DE) FRIESE, Gerald 80669 München (DE) KALTALIOGLU, Erdem Wappingers Falls, NY 12590 (US) (74) Representative: Karl, Frank  Patentanwälte Kindermann,Postfach 1330 85627 Grasbrunn 85627 Grasbrunn (DE)