| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
Designated Extension States: |
|
AL LT LV MK |
| (30) |
Priority: |
08.04.2002 US 370929 P
08.04.2002 US 370956 P
08.04.2002 US 370955 P
08.04.2002 US 370919 P
14.04.2002 US 372542 P
14.04.2002 US 372567 P
14.04.2002 US 372566 P
21.06.2002 US 390460 P
|
| (71) |
Applicant: ACM Research, Inc. |
|
Fremont, CA 94538 (US) |
|
| (72) |
Inventors: |
|
- WANG, Hui
Fremont, CA 94539 (US)
- NUCH, Voha
San, Jose, CA 95122 (US)
- GUTMAN, Felix
San Jose, CA 95136 (US)
- AFNAN, Muhammed
Fremont, CA 94539 (US)
- CHOKSHI, Himanshu, J.
Fremont, CA 94536 (US)
- VAN KERKWYK, Mark, Jacobus
Hayward, CA 94544 (US)
- KOEHLER, Damon, L.
Fremont, CA 94538 (US)
- YIH, Peihaur
Boonton, NJ 07005 (US)
- NGUYEN, My, Hoang
San Jose, CA 95127 (US)
- CHANG, Ru, Kao
Mountain View, CA 94040 (US)
- HO, Frederick
San Jose, CA 95123 (US)
|
| (74) |
Representative: Vleck, Jan Montagu |
|
Reddie & Grose,16 Theobalds Road
London WC1X 8PL
London WC1X 8PL (GB) |
|
