| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
Designated Extension States: |
|
AL LT LV MK |
| (30) |
Priority: |
10.04.2002 US 119290
23.09.2002 US 251780
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara,California 95054 (US) |
|
| (72) |
Inventors: |
|
- MURRELL, Adrian
Horsham,West Sussex RH12 4BS (GB)
- HARRISON, Bernard
Copthorpe,West Sussex RH10 3E (GB)
- EDWARDS, Peter
Kingsfold,West Sussex RH12 3ST (GB)
- KINDERSLEY, Peter
Horshaw,West Sussex RH13 7JT (GB)
- SAKASE, Takao
Rowley, MA 01938 (US)
- FARLEY, Marvin
Ipswich, MA 01938 (US)
- SATOH, Shu
Byfield, MA 01922 (US)
- RYDING, Geoffrey
Manchester, MA 01944 (US)
|
| (74) |
Representative: Cross, Rupert Edward Blount et al |
|
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB) |
|
