(19)
(11) EP 1 494 821 A1

(12)

(43) Date of publication:
12.01.2005 Bulletin 2005/02

(21) Application number: 03728337.1

(22) Date of filing: 03.04.2003
(51) International Patent Classification (IPC)7B08B 3/00
(86) International application number:
PCT/US2003/010354
(87) International publication number:
WO 2003/086668 (23.10.2003 Gazette 2003/43)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 05.04.2002 US 369852 P
05.04.2002 US 369853 P
19.12.2002 US 324221
31.03.2003 US 403147

(71) Applicant: BOC, INC.
Murray HillNew Jersey 07974 (US)

(72) Inventors:
  • BANERJEE, Souvik
    Fremont, CA 94536 (US)
  • CHUNG, Harlan, Forrest
    Castro Valley, CA 94552 (US)

(74) Representative: Wickham, Michael 
The BOC Group plc,Chertsey Road
Windlesham,Surrey GU20 6HJ
Windlesham,Surrey GU20 6HJ (GB)

   


(54) FLUID ASSISTED CRYOGENIC CLEANING