LOW CONTAMINATION COMPONENTS FOR SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MAKING COMPONENTS - Patent 1495155

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EP 1 495 155 A1

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(43)	Date of publication:
	12.01.2005 Bulletin 2005/02

(21)	Application number: 03745076.4

(22)	Date of filing: 12.02.2003

(51)	International Patent Classification (IPC)⁷: C23C 16/44, C23C 4/10, C23C 14/56, H01J 37/32

(86)	International application number:
	PCT/US2003/004061

(87)	International publication number:
	WO 2003/080892 (02.10.2003 Gazette 2003/40)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
	Designated Extension States:
	AL LT LV MK RO

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Priority:

21.03.2002 US 101701

(71)	Applicant: LAM RESEARCH CORPORATION
	Fremont, CA 94538 (US)

(72)	Inventor:
	O'DONNELL, Robert, J. Fremont, CA 94538 (US)

(74)	Representative: Diehl, Hermann, Dr. Dipl.-Phys. et al
	DIEHL, GLÄSER, HILTL & PARTNERPatentanwälteAugustenstrasse 46 80333 München 80333 München (DE)

(54)	LOW CONTAMINATION COMPONENTS FOR SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MAKING COMPONENTS