(19)

(11)

EP 1 495 161 A2

(12)

(88) Date of publication A3: 31.12.2003 (43) Date of publication: 12.01.2005 Bulletin 2005/02 (21) Application number: 03746750.3 (22) Date of filing: 11.04.2003

(51) International Patent Classification (IPC)7: C25D 5/00, C25D 5/48, C25D 5/52, C25D 5/50, C25D 5/08, B23H 11/00, B23H 3/00, B23H 5/00, B23H 7/00, B23H 9/00 (86) International application number: PCT/US2003/011417 (87) International publication number: WO 2003/088316 (23.10.2003 Gazette 2003/43)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 12.04.2002 US 372263 P 21.05.2002 US 382133 P 08.06.2002 US 387826 P 24.07.2002 US 398316 P (71) Applicant: ACM Research, Inc. Fremont, CA 94538 (US)	(72) Inventors: WANG, Hui Fremont, CA 94539 (US) WANG, Jian Fremont, CA 94539 (US) YIH, Peihaur Boonton, NJ 07005 (US) WU, Huiquan Rockville, MD 20852 (US) (74) Representative: Vleck, Jan Montagu  Reddie & Grose,16 Theobalds Road London WC1X 8PL London WC1X 8PL (GB)