| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
Designated Extension States: |
|
AL LT LV MK |
| (30) |
Priority: |
28.03.2002 US 368641 P
28.03.2002 US 368607 P
04.06.2002 US 163762
04.06.2002 US 163398
|
| (71) |
Applicant: KLA-Tencor Technologies Corporation |
|
San Jose, CA 95134 (US) |
|
| (72) |
Inventors: |
|
- WILK, Dieter, E.
San Jose, CA 95125 (US)
- TANG, Anlun
Pleasanton, CA 94566 (US)
- VELLA, Eric, N.
Mountain View, CA 94043 (US)
- RUNYON, Rex
Fremont, CA 94539 (US)
- SULLIVAN, Jamie, M.
Sunnyvale, CA 94086 (US)
- JOHNSON, Ralph, T.
Los Gatos, CA 95033 (US)
|
| (74) |
Representative: Pawlyn, Anthony Neil |
|
Urquhart-Dykes & Lord LLPTower North CentralMerrion Way
Leeds LS2 8PA
Leeds LS2 8PA (GB) |
|
