METHOD OF TREATMENT OF POROUS DIELECTRIC FILMS TO REDUCE DAMAGE DURING CLEANING - Patent 1495366

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EP 1 495 366 A1

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(43)	Date of publication:
	12.01.2005 Bulletin 2005/02

(21)	Application number: 03746699.2

(22)	Date of filing: 11.04.2003

(51)	International Patent Classification (IPC)⁷: G03F 7/00, G03F 7/16, G03F 7/36, G03F 7/42, C23C 8/00, C23C 14/02, C25F 1/00, C25F 5/00

(86)	International application number:
	PCT/US2003/011012

(87)	International publication number:
	WO 2003/087936 (23.10.2003 Gazette 2003/43)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

12.04.2002 US 372822 P

(71)	Applicant: Supercritical Systems Inc.
	Gilbert, AZ 85223 (US)

(72)	Inventor:
	SCHILLING, Paul Granite Bay, CA 95746 (US)

(74)	Representative: Goddar, Heinz J., Dr.
	FORRESTER & BOEHMERTPettenkoferstrasse 20-22 80336 München 80336 München (DE)

(54)	METHOD OF TREATMENT OF POROUS DIELECTRIC FILMS TO REDUCE DAMAGE DURING CLEANING