(19)
(11) EP 1 498 516 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
02.03.2011 Bulletin 2011/09

(45) Mention of the grant of the patent:
05.01.2011 Bulletin 2011/01

(21) Application number: 03717609.6

(22) Date of filing: 17.04.2003
(51) International Patent Classification (IPC): 
C30B 29/06(2006.01)
(86) International application number:
PCT/JP2003/004868
(87) International publication number:
WO 2003/089697 (30.10.2003 Gazette 2003/44)

(54)

SINGLE CRYSTAL SILICON PRODUCING METHOD, SINGLE CRYSTAL SILICON WAFER AND INGOT PRODUCED THEREBY

VERFAHREN ZUR HERSTELLUNG VON SILICIUMEINKRISTALLEN, UND DADURCH HERGESTELLTE SILICIUMEINKRISTALLWAFER UND SILICIUMEINKRISTALLSTAB

PROCEDE DE PRODUCTION DE SILICIUM MONOCRISTALLIN,PLAQUETTE DE SILICIUM MONOCRISTALLIN ET LINGOT DE SILICIUM MONOCRISTALLIN PRODUITS PAR CE PROCEDE

(84) Designated Contracting States:
DE

(30) Priority: 19.04.2002 JP 2002118281

(43) Date of publication of application:
19.01.2005 Bulletin 2005/03

(73) Proprietor: Sumco Techxiv Corporation
Omura-shi, Nagasaki 856-8555 (JP)

(72) Inventors:
  • Iida, Tetsuhiro, c/o SUMCO TECHXIV CORP
    Omura-shi, Nagasaki 856-8555 (JP)
  • Shiraishi, Yutaka, c/o SUMCO TECHXIV CORPORATION
    Omura-shi, Nagasaki 856-8555 (JP)
  • Suewaka, Ryota, c/o SUMCO TECHXIV CORPORATION
    Omura-shi, Nagasaki 856-8555 (JP)
  • Tomioka, Junsuke, c/o SUMCO TECHXIV CORPORATION
    Omura-shi, Nagasaki 856-8555 (JP)

(74) Representative: von Kreisler Selting Werner 
Deichmannhaus am Dom Bahnhofsvorplatz 1
50667 Köln
50667 Köln (DE)


(56) References cited: : 
GB-A- 1 370 292
JP-A- 9 249 486
US-A- 4 002 523
US-A- 5 911 823
 JP-A- 3 080 184
JP-A- 63 123 893
US-A- 5 769 941
US-A1- 2001 020 438
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).