(19)
(11) EP 1 502 279 A2

(12)

(88) Date of publication A3:
29.04.2004

(43) Date of publication:
02.02.2005 Bulletin 2005/05

(21) Application number: 03731110.7

(22) Date of filing: 07.05.2003
(51) International Patent Classification (IPC)7H01J 37/26, G01B 5/28
(86) International application number:
PCT/US2003/014284
(87) International publication number:
WO 2003/095616 (20.11.2003 Gazette 2003/47)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 07.05.2002 US 379710 P
07.05.2002 US 379660 P
07.05.2002 US 379645 P
07.05.2002 US 379552 P
07.05.2002 US 379711 P
07.05.2002 US 379543 P
07.05.2002 US 379643 P
07.05.2002 US 379708 P
07.05.2002 US 379681 P

(71) Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY
Pasadena,California 91125 (US)

(72) Inventors:
  • ROUKES, Michael, L.
    Pasadena, CA 91106 (US)
  • FRASER, Scott, E.
    La Canada, CA 91011 (US)
  • SOLOMON, Jerry, E.
    Glendale, CA 91214 (US)
  • CROSS, Michael, C.
    Claremont, CA 91711 (US)
  • ARLETT, Jessica, L.
    Pasadena, CA 91106-3011 (US)

(74) Representative: Kensett, John Hinton et al
Saunders & Dolleymore,9 Rickmansworth Road
Watford,Hertfordshire WD18 0JU
Watford,Hertfordshire WD18 0JU (GB)

   


(54) DYNAMICS BIONEMS SENSORS AND ARRAYS OF BIONEMS SENSOR IMMERSED IN FLUIDS