| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
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Designated Extension States: |
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AL LT LV MK |
| (30) |
Priority: |
08.05.2002 US 378799 P
22.11.2002 US 302375
22.11.2002 US 302393
08.04.2003 US 409887
|
| (71) |
Applicant: Applied Materials, Inc. |
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Santa Clara,California 95054 (US) |
|
| (72) |
Inventors: |
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- MOGHADAM, Farhad D.
Saratoga, CA 95070 (US)
- ZHAO, Jun
Cupertino, CA 95014 (US)
- WEIDMAN, Timothy
Sunnyvale, CA 94086 (US)
- ROBERTS, Rick J.
Sunnyvale, CA 94086 (US)
- XIA, Li-Qun
Santa Clara, CA 95054 (US)
- DEMOS, Alexandros T.
San Ramon, CA 94583 (US)
- ZHU, Wen H.
Sunnyvale, CA 94087 (US)
- HUANG, Tzu-Fang
San Jose, CA 95138 (US)
- LI, Lihua
San Jose, CA 95132 (US)
- YIEH, Ellie Y.
San Jose, CA 95138 (US)
- ZHENG, Yi
San Jose, CA 95128 (US)
- NEMANI, Srinivas D.
Sunnyvale, CA 94087 (US)
- HOLLAR, Eric
Cupertino, CA 95014 (US)
- YIM, Kang Sub
Mountain View, CA 94041 (US)
- NGUYEN, Son Van
Los Gatos, CA 95032 (US)
- D'CRUZ, Lester A.
San Jose, CA 95128 (US)
- KIM, Troy
Mountain View, CA 94041 (US)
- SUGIARTO, Dian
Sunnyvale, CA 94097 (US)
- LEE, Peter Wai-Man
San Jose, CA 95129 (US)
- M'SAAD, Hichem
Santa Clara, CA 95051 (US)
- TAM, Melissa M.
Fremont, CA 94536 (US)
|
| (74) |
Representative: Bayliss, Geoffrey Cyril et al |
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BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB) |
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