METHODS AND APPARATUS FOR CONTROLLING POWER IN VAPOR JET VACUUM PUMPS - Patent 1504193

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EP 1 504 193 A1

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(43)	Date of publication:
	09.02.2005 Bulletin 2005/06

(21)	Application number: 03719588.0

(22)	Date of filing: 04.04.2003

(51)	International Patent Classification (IPC)⁷: F04F 9/08

(86)	International application number:
	PCT/US2003/010373

(87)	International publication number:
	WO 2003/093679 (13.11.2003 Gazette 2003/46)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

29.04.2002 US 134540

(71)	Applicant: Varian, Inc.
	Palo Alto, CA 94304 (US)

(72)	Inventor:
	HABLANIAN, Marsbed Wellesley, MA 02481 (US)

(74)	Representative: Foster, Mark Charles et al
	Mathisen & MacaraThe Coach House6-8 Swakeley's Road Ickenham, Uxbridge Middlesex UB10 8BZ Ickenham, Uxbridge Middlesex UB10 8BZ (GB)

(54)	METHODS AND APPARATUS FOR CONTROLLING POWER IN VAPOR JET VACUUM PUMPS