(19)
(11) EP 1 506 329 A1

(12)

(43) Date of publication:
16.02.2005 Bulletin 2005/07

(21) Application number: 03726805.9

(22) Date of filing: 07.05.2003
(51) International Patent Classification (IPC)7C25D 21/12, C25D 5/02, C25D 5/12, C25D 1/00
(86) International application number:
PCT/US2003/014859
(87) International publication number:
WO 2003/095715 (20.11.2003 Gazette 2003/47)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 07.05.2002 US 379132 P

(71) Applicant: UNIVERSITY OF SOUTHERN CALIFORNIA
Los Angeles, CA 90007-4344 (US)

(72) Inventors:
  • ZHANG, Gang
    Monterey Park, CA 91754 (US)
  • COHEN, Adam, L.
    Los Angeles, CA 90035 (US)

(74) Representative: Hess, Peter K., Dipl.-Phys. 
Patent- und RechtsanwälteBardehle . Pagenberg . Dost .Altenberg . GeisslerPostfach 86 06 20
81633 München
81633 München (DE)

   


(54) METHODS AND APPARATUS FOR MONITORING DEPOSITION QUALITY DURING CONFORMABLE CONTACT MASK PLATING OPERATIONS