APPARATUS FOR MEASURING TOTAL PRESSURE AND PARTIAL PRESSURE WITH COMMON ELECTRON BEAM - Patent 1508154

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EP 1 508 154 A1

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(43)	Date of publication:
	23.02.2005 Bulletin 2005/08

(21)	Application number: 02756087.9

(22)	Date of filing: 28.05.2002

(51)	International Patent Classification (IPC)⁷: H01J 41/04, H01J 49/02

(86)	International application number:
	PCT/US2002/011737

(87)	International publication number:
	WO 2003/103005 (11.12.2003 Gazette 2003/50)

(84)	Designated Contracting States:
	DE FR GB

(71)	Applicant: Inficon, Inc.
	East Syracuse, NY 13057 (US)

(72)	Inventors:
	ELLEFSON, Robert, E. Manlius, NY 13104 (US) FREES, Louis, C. Manlius, NY 13104 (US)

(74)	Representative: Wehnert, Werner, Dipl.-Ing. et al
	Patentanwälte Graalfs, Wehnert, Döring, Siemons, Schildberg,Mozartstrasse 23 80336 München 80336 München (DE)

(54)	APPARATUS FOR MEASURING TOTAL PRESSURE AND PARTIAL PRESSURE WITH COMMON ELECTRON BEAM