(19)
(11) EP 1 510 848 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
19.05.2010 Bulletin 2010/20

(45) Mention of the grant of the patent:
31.03.2010 Bulletin 2010/13

(21) Application number: 04019841.8

(22) Date of filing: 20.08.2004
(51) International Patent Classification (IPC): 
G02B 26/08(2006.01)

(54)

Spatial light modulator using an integrated circuit actuator and method of making and using same

Räumlicher Lichtmodulator mit IC-Aktuator und Methode zur Herstellung desselben

Modulateur spatial de lumière utilisant un actuateur circuit intégré et sa méthode de fabrication

(84) Designated Contracting States:
DE FR

(30) Priority: 29.08.2003 US 651048

(43) Date of publication of application:
02.03.2005 Bulletin 2005/09

(73) Proprietor: ASML Holding N.V.
5504 DR Veldhoven (NL)

(72) Inventors:
  • Govil, Pradeep K.
    Norwalk Connecticut 06851 (US)
  • Tsacoyeanes, James G.
    Southbury Connecticut 06488 (US)

(74) Representative: Van den Hooven, Jan et al
ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL)


(56) References cited: : 
EP-A- 1 355 184
US-A- 5 862 002
 US-A- 5 735 026
US-A- 6 059 416
   
  • MILLS A A, CLIFT R: "Reflections on the 'Burning Mirrors of Archimedes'" EUR. J. PHYS., vol. 13, no. 6, November 1992 (1992-11), pages 268-279, XP002305571
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).