(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
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Designated Extension States: |
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AL LT LV MK |
(30) |
Priority: |
27.02.2003 US 376857
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(71) |
Applicant: Applied Materials, Inc. |
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Santa Clara, California 95054 (US) |
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(72) |
Inventors: |
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- Nguyen, Andrew
San Jose California 95132 (US)
- Schneider, Gerhard
Cupertino California 95014 (US)
- Hosokawa, Akihiro
Cupertino California 95014 (US)
- Matsumoto, Takayuki
Santa Clara California 95051 (US)
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(74) |
Representative: Zimmermann, Gerd Heinrich et al |
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Zimmermann & Partner, P.O. Box 33 09 20 80069 München 80069 München (DE) |
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