(19)
(11) EP 1 511 879 A1

(12)

(43) Date of publication:
09.03.2005 Bulletin 2005/10

(21) Application number: 03757295.5

(22) Date of filing: 29.05.2003
(51) International Patent Classification (IPC)7C23C 14/34
(86) International application number:
PCT/US2003/016827
(87) International publication number:
WO 2003/104522 (18.12.2003 Gazette 2003/51)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 07.06.2002 US 386433 P

(71) Applicant: Heraeus, Inc.
Chandler, AZ 85226 (US)

(72) Inventors:
  • SANDLIN, Michael
    Gilbert, AZ 85233 (US)
  • KUNKEL, Bernd
    Phoenix, AZ 85048 (US)
  • ZHANG, Willy
    Chandler, AZ 85224 (US)
  • CORNO, Philip
    Tempe, AZ 85282 (US)

(74) Representative: Hill, Justin John 
McDermott, Will & Emery,7 Bishopsgate
London EC2N 3AR
London EC2N 3AR (GB)

   


(54) FABRICATION OF DUCTILE INTERMETALLIC SPUTTERING TARGETS