(19)

(11)

EP 1 512 050 A2

(12)

(88) Date of publication A3: 18.03.2004 (43) Date of publication: 09.03.2005 Bulletin 2005/10 (21) Application number: 03731423.4 (22) Date of filing: 27.05.2003

(51) International Patent Classification (IPC)7: G03F 7/42 (86) International application number: PCT/US2003/016829 (87) International publication number: WO 2003/104901 (18.12.2003 Gazette 2003/51)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 07.06.2002 US 386800 P 07.08.2002 US 401688 P (71) Applicant: Mallinckrodt Baker, Inc. St. Louis, MO 63134 (US)	(72) Inventor: HSU, Chien-Pin, Sherman Basking Ridge, NJ 07920 (US) (74) Representative: Cockerton, Bruce Roger et al Carpmaels & Ransford,43-45 Bloomsbury Square London WC1A 2RA London WC1A 2RA (GB)