(19)
(11) EP 1 512 112 A2

(12)

(88) Date of publication A3:
24.06.2004

(43) Date of publication:
09.03.2005 Bulletin 2005/10

(21) Application number: 03736896.6

(22) Date of filing: 05.06.2003
(51) International Patent Classification (IPC)7: G06K 9/00, G01B 5/28, G06F 17/50, H01L 21/76
(86) International application number:
PCT/US2003/017899
(87) International publication number:
WO 2003/104929 (18.12.2003 Gazette 2003/51)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 05.06.2002 US 386285 P
11.07.2002 US 395847 P
19.03.2003 US 456681 P
14.05.2003 US 438962
14.05.2003 US 438963

(71) Applicant: KLA-Tencor Technologies Corporation
Milpitas, California 95035 (US)

(72) Inventors:
  • SELIGSON, Joel, L.
    20184 Misgav (IL)
  • GHINOVKER, Mark
    23019 Migdal Ha'Emek (IL)
  • IZIKSON, Pavel
    32293 Haifa (IL)
  • SIMKIN, Boris
    32804 Haifa (IL)
  • ROBINSON, John
    Austin, TX 78731 (US)
  • ADEL, Michael, E.
    30900 Zichron Ya'akov (IL)
  • TULIPMAN, David
    34323 Haifa (IL)

(74) Representative: Alton, Andrew 
Urquhart-Dykes & Lord LLPTower North CentralMerrion Way
Leeds LS2 8PA
Leeds LS2 8PA (GB)

   


(54) USE OF OVERLAY DIAGNOSTICS FOR ENHANCED AUTOMATIC PROCESS CONTROL