(19)
(11) EP 1 513 767 A1

(12)

(43) Date of publication:
16.03.2005 Bulletin 2005/11

(21) Application number: 03700924.8

(22) Date of filing: 24.01.2003
(51) International Patent Classification (IPC)7: C01B 31/02, C30B 23/00, C30B 29/60, H05H 1/24
(86) International application number:
PCT/GB2003/000249
(87) International publication number:
WO 2003/062146 (31.07.2003 Gazette 2003/31)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
Designated Extension States:
AL LT LV MK RO

(30) Priority: 24.01.2002 GB 0201600

(71) Applicant: Cambridge University Technical Services Limited
Cambridge CB2 1SB (GB)

(72) Inventors:
  • SHAFFER, Milo
    Cambridge CB2 1LR (GB)
  • KINLOCH, Ian
    Cambridge CB4 9XU (GB)
  • CASH, Stephen
    North Yorkshire D16 3DR (GB)
  • MCKINNON, Ian
    Co. Durham D13 0ZW (GB)
  • WINDLE, Alan, H.
    Cambridge CB3 0DP (GB)

(74) Representative: Hatt, Anna Louise 
Beck GreenerFulwood House12 Fulwood Place
London WC1V 6HR
London WC1V 6HR (GB)

   


(54) PLASMA SYNTHESIS OF HOLLOW NANOSTRUCTURES