ACID ETCHING MIXTURE HAVING REDUCED WATER CONTENT - Patent 1516356

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EP 1 516 356 A2

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(88)	Date of publication A3:
	15.04.2004

(43)	Date of publication:
	23.03.2005 Bulletin 2005/12

(21)	Application number: 03737149.9

(22)	Date of filing: 18.06.2003

(51)	International Patent Classification (IPC)⁷: H01L 21/00

(86)	International application number:
	PCT/US2003/019079

(87)	International publication number:
	WO 2003/107400 (24.12.2003 Gazette 2003/52)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

18.06.2002 US 174174

(71)	Applicant: Honeywell International Inc.
	Morristown, New Jersey 07960 (US)

(72)	Inventors:
	DODD, Michael, A. Chandler, AZ 85225 (US) SIEVERT, Wolfgang 31515 Wunstrof (DE) ZIMMERMAN, Kurt-Uwe 31515 Wunstrof (DE) MCFARLAND, John Scottsdale AZ 85260 (US)

(74)	Representative: Hucker, Charlotte Jane
	Gill Jennings & EveryBroadgate House,7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)

(54)	ACID ETCHING MIXTURE HAVING REDUCED WATER CONTENT