(19)
(11) EP 1 516 360 A1

(12)

(43) Date of publication:
23.03.2005 Bulletin 2005/12

(21) Application number: 02737569.0

(22) Date of filing: 21.06.2002
(51) International Patent Classification (IPC)7H01L 21/312, B05D 5/08
(86) International application number:
PCT/US2002/019702
(87) International publication number:
WO 2004/001832 (31.12.2003 Gazette 2004/01)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(71) Applicant: E.I. DU PONT DE NEMOURS AND COMPANY
Wilmington,Delaware 19898 (US)

(72) Inventors:
  • MOCELLA, Michael
    Chadds Ford, PA 19317 (US)
  • FEIRING, Andrew, E.
    Wilmington, DE 19807 (US)
  • TREAT, Theodore, A.
    Washington, WV 26181 (US)
  • LOPATA, Eugene
    Scotts Valley, CA 95066 (US)
  • ROSE, Peter
    Boulder Creek, CA 95060 (US)
  • BRICHKO, Yakov
    Mountain View, CA 94043 (US)

(74) Representative: Matthews, Derek Peter 
Frank B. Dehn & Co.,European Patent Attorneys,179 Queen Victoria Street
London EC4V 4EL
London EC4V 4EL (GB)

   


(54) FLUOROPOLYMER INTERLAYER DIELECTRIC BY CHEMICAL VAPOR DEPOSITION