(19)
(11) EP 1 521 797 A1

(12)

(43) Date of publication:
13.04.2005 Bulletin 2005/15

(21) Application number: 02765835.0

(22) Date of filing: 11.07.2002
(51) International Patent Classification (IPC)7C08G 77/04
(86) International application number:
PCT/US2002/022176
(87) International publication number:
WO 2004/007192 (22.01.2004 Gazette 2004/04)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(71) Applicant: International Business Machines Corporation
Armonk, N.Y. 10504 (US)

(72) Inventors:
  • ANGELOPOULOS, Marie
    Cortlandt Manor, NY 10567 (US)
  • ARIRAM, Ari
    Croton-on-Hudson, NY 10520 (US)
  • GUARNIERI, C., Richard
    Somers, NY 10589 (US)
  • HUANG, Wu-Song
    Poughkeepsie, NY 12603 (US)
  • KWONG, Ranee
    Wappingers Falls, NY 12590 (US)
  • MOREAU, Wayne, M.
    Wappingers Falls, NY 12590 (US)

(74) Representative: Moss, Robert Douglas 
IBM United Kingdom Ltd,MP 110,Hursley Park
Winchester,Hampshire SO21 2JN
Winchester,Hampshire SO21 2JN (GB)

   


(54) ANTIREFLECTIVE SILICON-CONTAINING COMPOSITIONS AS HARDMASK LAYER