| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
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Designated Extension States: |
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AL LT LV MK |
| (30) |
Priority: |
15.07.2002 US 396536 P
22.11.2002 US 428526 P
|
| (71) |
Applicant: Aviza Technology, Inc. |
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Scotts Valley, CA 95066-4081 (US) |
|
| (72) |
Inventors: |
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- DUBOIS, Dale, R.
Los Gatos, CA 95032 (US)
- NAM, Jamie, H.
Scotts Valley, CA 95066 (US)
- WILDMAN, Craig
Sunnyvale, CA 94087 (US)
- QIU, Taiquing
Los Gatos, CA 95032 (US)
- KOWALSKI, Jeffrey, M.
Aptos, CA 95003 (US)
|
| (74) |
Representative: Stoner, Gerard Patrick et al |
|
Mewburn Ellis LLPYork House23 Kingsway
London WC2B 6HP
London WC2B 6HP (GB) |
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