(19)
(11) EP 1 522 893 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
14.12.2005 Bulletin 2005/50

(43) Date of publication A2:
13.04.2005 Bulletin 2005/15

(21) Application number: 04023064.1

(22) Date of filing: 28.09.2004
(51) International Patent Classification (IPC)7G03F 7/20
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL HR LT LV MK

(30) Priority: 06.10.2003 JP 2003347167

(71) Applicant: CANON KABUSHIKI KAISHA
Tokyo (JP)

(72) Inventor:
  • Orino, Kanjo
    Tokyo (JP)

(74) Representative: TBK-Patent 
Bavariaring 4-6
80336 München
80336 München (DE)

   


(54) Illumination optical system and exposure apparatus having the same


(57) An illumination optical system for illuminating an object surface using light from a light source includes a condenser optical system (110) for directing the light from the light source to the object surface (IS), wherein the condenser optical system includes first and second optical systems, one of which forms a beam expander optical system (120) for varying a diameter of incident light, the beam expander being adapted to be movable as one element along an optical axis.







Search report