(19)
(11) EP 1 523 671 A2

(12)

(88) Date of publication A3:
10.06.2004

(43) Date of publication:
20.04.2005 Bulletin 2005/16

(21) Application number: 03764488.7

(22) Date of filing: 11.07.2003
(51) International Patent Classification (IPC)7: G01N 23/225, G06T 11/00
(86) International application number:
PCT/US2003/021690
(87) International publication number:
WO 2004/008255 (22.01.2004 Gazette 2004/04)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 11.07.2002 US 394864 P

(71) Applicants:
  • Applied Materials, Inc.
    Santa Clara,California 95052 (US)
  • Applied Materials Israel Ltd.
    Rehovot 76236 (IL)

(72) Inventors:
  • SENDER, Benzion
    71707 Modiin (IL)
  • DROR, Ophir
    73142 Shaoham (IL)
  • TAM, Aviram
    75743 Rishon Le Zion (IL)
  • MENADEVA, Ovadya
    71700 Modiin (IL)
  • KRIS, Roman
    97876 Jerusalem (IL)

   


(54) METHOD AND APPARATUS FOR MEASURING CRITICAL DIMENSIONS WITH A PARTICLE BEAM