FIDUCIAL ALIGNMENT MARKS ON MICROELECTRONIC SPRING CONTACTS - Patent 1523684

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EP 1 523 684 A1

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(43)	Date of publication:
	20.04.2005 Bulletin 2005/16

(21)	Application number: 02752348.9

(22)	Date of filing: 15.07.2002

(51)	International Patent Classification (IPC)⁷: G01R 1/073, H01L 21/66

(86)	International application number:
	PCT/US2002/022477

(87)	International publication number:
	WO 2004/015432 (19.02.2004 Gazette 2004/08)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
	Designated Extension States:
	AL LT LV MK RO SI

(71)	Applicant: FORMFACTOR, INC.
	Livermore, CA 94550 (US)

(72)	Inventors:
	MARTIN, Robert, C. San Francisco, CA 94114 (US) WATJE, Eric, T. Santa Clara, CA 95051 (US)

(74)	Representative: Käck, Jürgen, Dipl.-Ing.
	Kahler Käck MollekopfPatentanwälteVorderer Anger 239 86899 Landsberg 86899 Landsberg (DE)

(54)	FIDUCIAL ALIGNMENT MARKS ON MICROELECTRONIC SPRING CONTACTS