SYSTEM AND METHOD OF OPERATION OF AN EMBEDDED SYSTEM FOR A DIGITAL CAPACITANCE DIAPHRAGM GAUGE - Patent 1527327

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EP 1 527 327 A2

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(88)	Date of publication A3:
	18.03.2004

(43)	Date of publication:
	04.05.2005 Bulletin 2005/18

(21)	Application number: 03731440.8

(22)	Date of filing: 29.05.2003

(51)	International Patent Classification (IPC)⁷: G01L 9/12

(86)	International application number:
	PCT/US2003/016911

(87)	International publication number:
	WO 2003/102527 (11.12.2003 Gazette 2003/50)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

31.05.2002 US 63991

(71)	Applicant: Mykrolis Corporation
	Billerica, MA 01821-4600 (US)

(72)	Inventors:
	ALBERT, David, M. Allen, TX 75002 (US) ARRANT, Edwin, K. Plano, TX 75074 (US) EDWARDS, Marvin, B. Coppell, TX 75019 (US)

(74)	Representative: Schäfer, Wolfgang, Dipl.-Ing.
	Dreiss, Fuhlendorf, Steimle & BeckerPostfach 10 37 62 70032 Stuttgart 70032 Stuttgart (DE)

(54)	SYSTEM AND METHOD OF OPERATION OF AN EMBEDDED SYSTEM FOR A DIGITAL CAPACITANCE DIAPHRAGM GAUGE