(19)

(11)

EP 1 527 397 A2

(12)

(88) Date of publication A3: 03.03.2005 (43) Date of publication: 04.05.2005 Bulletin 2005/18 (21) Application number: 02774117.2 (22) Date of filing: 24.05.2002

(51) International Patent Classification (IPC)7: G06F 17/15 (86) International application number: PCT/US2002/016475 (87) International publication number: WO 2002/097655 (05.12.2002 Gazette 2002/49)

(84) Designated Contracting States: AT BE CH DE GB LI NL (30) Priority: 29.05.2001 US 866890 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95052 (US)	(72) Inventors: COPELAND, David, Jeremy Frankfort, KY 40601 (US) CRANDALL, Richard, E. Portland, OR 97202 (US) HOFMANN, Ulrich Castro Valley, CA 94552 (US) LOZES, Richard, L. Pleasanton, CA 94588 (US) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)