(19)

(11)

EP 1 529 310 A2

(12)

(88) Date of publication A3: 24.02.2005 (43) Date of publication: 11.05.2005 Bulletin 2005/19 (21) Application number: 02797318.9 (22) Date of filing: 13.12.2002

(51) International Patent Classification (IPC)7: H01L 23/48, H01L 21/4763 (86) International application number: PCT/US2002/040020 (87) International publication number: WO 2003/054928 (03.07.2003 Gazette 2003/27)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR (30) Priority: 13.12.2001 US 339734 P 08.11.2002 US 290616 08.11.2002 US 290682 (71) Applicant: International Business Machines Corporation Armonk, NY 10504 (US)

(72) Inventors: FORNOF, Ann, R.,c/o IBM United Kingdom Limited Winchester, Hampshire SO21 2JN (GB) HEDRICK, Jeffrey, C. Montvalle, NJ 07645 (US) LEE, Kang-Wook Yorktown Heights, NY 10598 (US) MALONE, Kelly Poughkeepsie, NY 12601 (US) TYBERG, Christy, S. Mahopac, NY 10541 (US) (74) Representative: Litherland, David Peter  IBM United Kingdom LimitedIntellectual Property DepartmentHursley Park Winchester,Hampshire SO21 2JN Winchester,Hampshire SO21 2JN (GB)