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(11)

EP 1 535 296 A1

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(43) Date of publication: 01.06.2005 Bulletin 2005/22 (21) Application number: 02746591.3 (22) Date of filing: 14.06.2002

(51) International Patent Classification (IPC)7: H01H 57/00, H01L 21/00 (86) International application number: PCT/US2002/019449 (87) International publication number: WO 2003/107372 (24.12.2003 Gazette 2003/52)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (71) Applicant: International Business Machines Corporation Armonk, NY 10504 (US)

(72) Inventors: DELIGIANNI, Hariklia Tenafly, NJ 07670 (US) GREENBERG, David, R. White Plains, NY 10601 (US) JAHNES, Christopher, V. Upper Saddle River, NJ 07458 (US) LUND, Jennifer, L. Amawalk, NY 10501 (US) SAENGER, Katherine, L. Ossining, NY 10462 (US) VOLANT, Richard, P. New Fairfield, CT 06812 (US) (74) Representative: Burt, Roger James, Dr. et al IBM United Kingdom LimitedIntellectual Property DepartmentHursley Park WinchesterHampshire SO21 2JN WinchesterHampshire SO21 2JN (GB)