(19)
(11) EP 1 535 316 A1

(12)

(43) Date of publication:
01.06.2005 Bulletin 2005/22

(21) Application number: 03752145.7

(22) Date of filing: 29.08.2003
(51) International Patent Classification (IPC)7: H01L 21/28, H01L 29/51
(86) International application number:
PCT/US2003/028219
(87) International publication number:
WO 2004/021424 (11.03.2004 Gazette 2004/11)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 02.09.2002 DE 10240408
31.03.2003 US 403556

(71) Applicant: ADVANCED MICRO DEVICES INC.
Sunnyvale,California 94088-3453 (US)

(72) Inventors:
  • WIECZOREK, Karsten
    DE-01109 Dresden (DE)
  • RADEHAUS, Christian
    DE-09123 Chemnitz (DE)

(74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) TRANSISTOR ELEMENT HAVING AN ANISOTROPIC HIGH-K GATE DIELECTRIC