(19)

(11)

EP 1 535 341 A1

(12)

(43) Date of publication: 01.06.2005 Bulletin 2005/22 (21) Application number: 02734808.5 (22) Date of filing: 14.06.2002

(51) International Patent Classification (IPC)7: H01L 29/40, H01L 21/82 (86) International application number: PCT/US2002/019238 (87) International publication number: WO 2003/107430 (24.12.2003 Gazette 2003/52)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (71) Applicant: International Business Machines Corporation Armonk, N.Y. 10504 (US)	(72) Inventors: DIVAKARUNI, Ramachandra Ossining, NY 10562 (US) GLUSCHENKOV, Oleg Wappingers Falls, NY 12590 (US) MANDELMAN, Jack, A. Stormville, NY 12582 (US) RADENS, Carl, J. LaGrangeville, NY 12540 (US) WONG, Robert, C. Poughkeepsie, NY 12603 (US) (74) Representative: Mather, Belinda  IBM United Kingdom Ltd.,MP 110,Hursley Park Winchester,Hampshire SO21 2JN Winchester,Hampshire SO21 2JN (GB)