(19)

(11)

EP 1 537 251 A1

(12)

(43) Date of publication: 08.06.2005 Bulletin 2005/23 (21) Application number: 03790958.7 (22) Date of filing: 28.08.2003

(51) International Patent Classification (IPC)7: C23C 2/06, C23C 2/28 (86) International application number: PCT/EP2003/009730 (87) International publication number: WO 2004/020684 (11.03.2004 Gazette 2004/11)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 28.08.2002 EP 02078543 03.09.2002 US 407244 P (71) Applicant: Umicore 1000 Brussels (BE)	(72) Inventors: GAY, Bruno B-1000 Brussels (BE) CLAESSENS, Serge B-2100 Deurne (BE)